High-k oxides by ALD

In collaboration with the EU COST networking project HerALD, Institute of Physics, Polish Academy of Sciences, NaMLab and Polish Vacuum Society invite you to the next edition of the conference "High-k oxides by ALD", which will be held in Wroclaw, Poland, on March 7-10, 2018. New challenges offered by the application of ALD based high-k dielectric materials in nanotechnology will be discussed by more than 80…

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